Xiangdong LiKaren GeensDirk WellekensMing ZhaoAlessandro MagnaniNooshin AmirifarBenoit BakerootShuzhen YouDirk FahleHerwig HahnMichael HeukenVlad OdnoblyudovOzgur AktasCem BasceriDenis MarconGuido GroesenekenStefaan Decoutere
A1
Journal Article
in
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
2020