The project consists in two parts. On one hand Europlasma will convert its low pressure reactor to a (PE)ALD

reactor and on the other hand Alz03 and ZnO processes will be optimized for deposition of hydrophobic or

antimicrobial coatings in open cell polymer structures, such as non-wovens and foams. The originality of the

project consists in the PEALD process optimization and understanding on these specific complex polymer

substrates, as on this aspect literature is scarce and limited to lab results. Other aspects are already known:

commercial PEALD reactors are available, also for non-semiconductor applications; A}i03 and ZnO are

amongst the easiest ALD processes and thus well documented in literature, however typically on non-polymer

substrates and mainly for semiconductor applications. The proposed approach consists on lab scale research

on polymer substrates allowing selection of applications and if successful, transfer and upscaling.

All experts confinn that the project choice to focus on 3D polymer structures for non-sernicon applications is

relevant and, if successful, might lead to relevant niche market applications.