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Project

Development of an in-situ flux energy flux analysator and flux monitor, to study the growth of thin films deposited by physical vapor deposition

Outputs and Outcomes

Code

31504008

Duration

01 January 2008 → 31 December 2010

Funding

Research Foundation - Flanders (FWO)

Promotor

Diederik Depla

Research disciplines

Natural sciences
- Physics of gases, plasmas and electric discharges not elsewhere classified

Keywords

magnetron sputtering energy flux thin film growth

Project description

Two techniques will be developed to measure all fluxes towards the substrate during deposition. They should allow to model the energy flux, momentum flux and material flux towards the substrate as a function of the used deposition conditions. Comparing the properties of thin films deposited at similar conditions, should allow the user to investigate the fundamental aspects of thin film growth.

English

Dutch

English

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