Code
01SF0213
Duration
01 January 2014 → 31 January 2018
Funding
Regional and community funding: Special Research Fund
Promotor
Fellow
Research disciplines
-
Natural sciences
- Dielectrics, piezoelectrics and ferroelectrics
- Electronic (transport) properties
- Structural and mechanical properties
- Condensed matter physics and nanophysics not elsewhere classified
- Materials physics not elsewhere classified
- Physics of (fusion) plasmas and electric discharges
Keywords
growth mechanis
simulation
Magnetron sputter deposition
Project description
The project is devoted to study of the fundamental aspects of RF-magnetron sputter deposition of calcium phosphate coatings.The goal is to establish the relationship between the deposition parameters (such as discharge power, chamber pressure, gas atmosphere and substrate temperature) and the CaPfilms properties. The combination of both thin film and plasma characterisation allows to elucidatecoatings growth mechanisms.