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Natural sciences
- Dielectrics, piezoelectrics and ferroelectrics
- Photonics, optoelectronics and optical communications
- Inorganic chemistry not elsewhere classified
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Engineering and technology
- Nanophotonics
FFLIES aims to fabricate a heterogeneously integrated BaTiO3 film optical phase modulator by μ-transfer printing BaTiO3 coupons on photonic integrated circuits (PICs). The performance of the modulator will be validated by determining the Figure of Merit (FoM) (VπLα) and compared with the current state-of-the-art in heterogeneously integrated phase modulators (VπLα < 5 V dB). Demonstration of a proof of performance of the fabricated BaTiO3 films and showing compatibility with a Back-End-of-Line (BEOL) integration method (e.g. μ-transfer printing) are vital aspects in the valorization pathway. Subsequently, the FAB introduction of the BaTiO3 wafers will be prepared by determining the wafer specification including roughness, elemental analysis, particle contamination. The overall goal is to establish a spin-off company to commercialize BaTiO3 wafers for use in silicon photonic applications at the end of this project.