Deposition of plasma-polymerized thin films at medium pressure

01 January 2013 → 31 December 2015
Research Foundation - Flanders (FWO)
Research disciplines
  • Natural sciences
    • Other biological sciences
    • Other natural sciences
Project description

In our previous work, the applicability of medium pressure plasmas was clearly demonstrated for surface activation. However, the use of medium pressure plasmas for depositing a thin polymer film onto a substrate, so-called plasma-polymerization, has not yet been studied. This technique demands the injection of a liquid or gaseous monomer in the plasma. This project aims at investigating the possibilities of medium pressure DBDs for depositing thin plasma-polymerized films. The effect of the different operating parameters (like operating pressure, electrical power, substrate, carrier gas, monomer) on the deposited thin films will be studied in detail. To achieve the goals of this project there is need for: (a) a small FT-IR spectrometer with Attenuated Total Reflectance (ATR) unit and (b) an advanced monomer injection system.