Study and Optimization of mechanical-electronical interaction in micromachined inertial sensors

01 January 2007 → 31 October 2012
Regional and community funding: Special Research Fund
Research disciplines
  • Engineering and technology
    • Design theories and methods
    • Mechanics
    • Other mechanical and manufacturing engineering
Sigma-Delta modulation accelerometer gyroscope
Project description

The goal of this project is to increase the accuracy of micromachined inertial sensor such as accelerometers and gyroscopes. For this purpose, the various imperfections of the mechanical structure and readout electronics will be modeled. Based on thse models, we will investigate whether the effect of these imperfections can be suppressed through the use of Sigma Delta control loops.