Acronym
NaMiFab
Code
BOF/COR/2023/002
Duration
01 March 2023 → 28 February 2027
Funding
Regional and community funding: Special Research Fund
Promotor-spokesperson
Research disciplines
-
Engineering and technology
- Nanoelectronics
- Nanophotonics
- Micro- and nanoelectromechanical systems
- Microfabrication and manufacturing
- Nanofabrication and nanomanufacturing
Keywords
Nanofabrication
Microfabrication
Cleanroom processing
Project description
NaMiFab brings together the processing equipment and expertise for Nano- and
Microfabrication of three UGent research groups from the departments INTEC (EA05) and ELIS (EA06) (Faculty of Engineering and Architecture):
• Photonics Research Group (PRG)
• Centre for Microsystems Technology (CMST)
• Liquid Crystals and Photonics Group (LCP)
About 100 tools, used for fabrication and characterization at the nano- and micrometer scale, are located in the Ghent University cleanroom building at campus Ardoyen. This extensive set of instruments is relevant for e.g. applications in photonics, micro- and nanoelectronics, material research and biomedical engineering.