Project

Cofunding core facility - Nano- and Microfabrication (NaMiFab)

Acronym
NaMiFab
Code
BOF/COR/2023/002
Duration
01 March 2023 → 28 February 2026
Funding
Regional and community funding: Special Research Fund
Promotor-spokesperson
Research disciplines
  • Engineering and technology
    • Nanoelectronics
    • Nanophotonics
    • Micro- and nanoelectromechanical systems
    • Microfabrication and manufacturing
    • Nanofabrication and nanomanufacturing
Keywords
Nanofabrication Microfabrication Cleanroom processing
 
Project description

NaMiFab brings together the processing equipment and expertise for Nano- and
Microfabrication of three UGent research groups from the departments INTEC (EA05) and ELIS (EA06) (Faculty of Engineering and Architecture):
• Photonics Research Group (PRG)
• Centre for Microsystems Technology (CMST)
• Liquid Crystals and Photonics Group (LCP)
About 100 tools, used for fabrication and characterization at the nano- and micrometer scale, are located in the Ghent University cleanroom building at campus Ardoyen. This extensive set of instruments is relevant for e.g. applications in photonics, micro- and nanoelectronics, material research and biomedical engineering.