In-situ investigation of novel approaches for the conformal deposition of complex oxides by combining ALD with solid-state and electrochemical reactions

01 October 2013 → 30 September 2017
Regional and community funding: Special Research Fund, Research Foundation - Flanders (FWO)
Research disciplines
  • Natural sciences
    • Condensed matter physics and nanophysics
XRD oxides ALD in situ
Project description

We investigate the synthesis of conformal films of

complex oxides by combining atomic layer deposition with solid-state and

electrochemical reactions. Additionally, we study the structural and/or

phase changes during these reactions using in-situ methods such as X-ray

diffraction and ellipsometry.