Project

Pulse generator for ultadense plasma

Code
01B02012
Looptijd
15-06-2012 → 30-06-2016
Financiering
Regional and community funding: Special Research Fund
Onderzoeksdisciplines
  • Natural sciences
    • Dielectrics, piezoelectrics and ferroelectrics
    • Condensed matter physics and nanophysics not elsewhere classified
    • Materials physics not elsewhere classified
    • Physics of (fusion) plasmas and electric discharges
Trefwoorden
dunne laagdepositie HIPIMS plasmafysica
 
Projectomschrijving

High Power Impulse Magnetron Sputtering (HIPIMS)is a deposition technique for thin films. This technique is based on the more traditional magnetron sputtering, a deposition technique which leans upon a magnetic assisted glow discharge. The ionization degree and plasma density is strongly increased by applying a high power pulse. Moreover, the plasma becomes metal based. By negative polarisation of the substrate, metal ions can be conducted towards the substrate to influence in this way the thin film growth, allowing to optimize the film properties.