Study of ALD barrier layers for the embedding of electronic and opto-electronic components in a smart microsystem in direct contact with the human body.

01 October 2015 → 30 September 2020
Research Foundation - Flanders (FWO)
Research disciplines
  • Natural sciences
    • Analytical chemistry
    • Macromolecular and materials chemistry
  • Engineering and technology
    • Nanotechnology
    • Design theories and methods
    • Ceramic and glass materials
    • Materials science and engineering
    • Semiconductor materials
    • Other materials engineering
embedding of electronics ALD microsystems biocompatible Barrier layers
Project description

Microsystems in direct contact with the human body are only being introduced at a slow rate due to high demands on safety. In this project we want to demonstrate that a stack of thin oxide and/or nitride layers, produced using ‘atomic layer deposition’, can generate a reliable biocompatible and biostable barrier, that could enable introduction of smart biomedical microsystems.