Code
179I89B7
Duration
01 March 2007 → 28 February 2011
Funding
Regional and community funding: various
Promotor
Research disciplines
-
Natural sciences
- Applied mathematics in specific fields
- Classical physics
- Optical physics
-
Engineering and technology
- Nanotechnology
- Design theories and methods
Keywords
microsystems
MEMS
diffraction gratings
Project description
This project will develop a generic technology for the integration of microsystems and electronics, based on deposited SiGe layers with controlled stress. Te photonics research group will use these layers to design and characterize a optical modulator.