Project

In situ study of surface reactions during Atomic Layer Deposition

Code
bof/baf/4y/2024/01/698
Duration
01 January 2024 → 31 December 2025
Funding
Regional and community funding: Special Research Fund
Research disciplines
  • Natural sciences
    • Nanophysics and nanosystems
    • Surfaces, interfaces, 2D materials
  • Engineering and technology
    • Surface engineering
Keywords
thin film atomic layer deposition x-ray photoelectron spectroscopy
 
Project description

Atomic layer deposition (ALD) is a technique used to apply thin layers with atomic precision on substrates and powders. The technique has applications in microelectronics and for functionalizing/stabilizing battery electrodes and (electro)catalytic materials. The COCOON research group at Ghent University has developed expertise and infrastructure to study surface reactions during ALD 'in situ,' without exposing the growth surface to air. The goal of this project involves using techniques such as X-ray photoelectron spectroscopy to study the growth mechanism of ALD layers.