Type
Equipment
Acronym
FlibScribe
Code
APP/00237
Date of commissioning
01 January 2024 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
backside scribe
wafer scribing
manual cleaving
Brand Name/manufacturer
Mercia Semiconductor
Other information
Description
Backside Scribing tool - Enables accurate cleaving through frontside targets with a scribe made on the backside of the substrate. - Scribe does not damage the front side of the sample. - Accuracy of scribe ±200 μm (achievable) - Capable of scribing bonded crystalline and amorphous wafers and chips for subsequent cleaving.