Type
Equipment
Acronym
Vacuum laminator
Code
APP/00295
Date of commissioning
01 January 2005 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
substrate bonding
vacuum lamination
thermal processing
Brand Name/manufacturer
Lauffer RLKV 25/1h
Other information
Description
Automated vacuum lamination press with controlled temperature and pressure profiles for 330 mm by 280 mm substrates.