Type
Equipment
Acronym
Film Sense
Code
APP/00285
Date of commissioning
01 July 2020 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
refractive index
ellipsometry
thin film measurement
transparent films
layer thickness
optical properties
Brand Name/manufacturer
Film Sense FS-1EX
Other information
Description
A multi-wavelength ellipsometer for accurate thickness measurement of transparent or semi-transparent thin films and layer stacks.