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Infrastructure
PDMS spinner
Information
Contact
Organisations
Access & Terms of use
Type
Equipment
Acronym
PDMS spinner
Code
APP/00331
Date of commissioning
01 January 2012 → …
Organisation
Department of Electronics and information systems (EA06)
NaMiFab - Cleanroom Facility for Nano- and MicroFabrication (CF011)
Lead faculty
Faculty of Engineering and Architecture
Research disciplines
Engineering and technology
Semiconductor devices, nanoelectronics and technology
Keywords
spin coating
PDMS films
Brand Name/manufacturer
APT Spin150
Other information
Website
Description
A spin coater for uniform coating of PDMS and other materials on substrates up to 150 mm.