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Researcher
Sarah Heirwegh
Profile
Projects
Publications
Activities
Awards & Distinctions
2
Results
2006
Monte Carlo simulation of the transport of atoms in DC magnetron sputtering
Stijn Mahieu
Guy Buyle
Diederik Depla
Sarah Heirwegh
Pieter Ghekiere
Roger De Gryse
A1
Journal Article
in
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
2006
2005
Mechanism of preferential orientation in sputter deposited titanium nitride and yttria-stabilized zirconia layers
Stijn Mahieu
Pieter Ghekiere
Griet De Winter
Sarah Heirwegh
Diederik Depla
Roger De Gryse
OI LEBEDEV
G VAN TENDELOO
A1
Journal Article
in
JOURNAL OF CRYSTAL GROWTH
2005