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Researcher
Magi Margalit Nagar
Profile
Projects
Publications
Activities
Awards & Distinctions
11
Results
2014
The effect of polyether suppressors on the nucleation and growth of copper on RuTa seeded substrate for direct copper plating
Magi Margalit Nagar
A Radisic
Katrien Strubbe
PM Vereecken
A1
Journal Article
in
ELECTROCHIMICA ACTA
2014
2013
Systematic studies of electrochemical nucleation and growth of copper on Ru-based substrates for damascene process
Magi Margalit Nagar
Katrien Strubbe
Dissertation
2013
The effect of cupric ion concentration on the nucleation and growth of copper on RuTa seeded substrates
Magi Margalit Nagar
Alec Radisic
Katrien Strubbe
Philippe M Vereecken
A1
Journal Article
in
ELECTROCHIMICA ACTA
2013
2012
Exploration of process window for fill of sub 30 nm features by direct plating
Magi Margalit Nagar
Aleksandar Radisic
Katrien Strubbe
Philippe M Vereecken
C3
Conference
2012
Multi-scale modeling of direct copper plating on resistive non-copper substrates
Liu Yang
Aleksandar Radisic
Magi Margalit Nagar
Johan Deconinck
Leonardus Leunissen
Philippe M. Vereecken
Alan C. West
C3
Conference
2012
Nucleation and growth of copper on Ru-based substrates, I : the effect of the inorganic components
Magi Margalit Nagar
Philippe M Vereecken
Katrien Strubbe
Alexandar Radisic
P1
Conference
2012
Nucleation and growth of copper on Ru-based substrates, II : the effect of the suppressor additive
Magi Margalit Nagar
Aleksandar Radisic
Katrien Strubbe
Philippe M Vereecken
P1
Conference
2012
2011
Direct copper electrochemical deposition on Ru-based substrates for advanced interconnects target 30 nm and 1/2 pitch lines : from coupon to full-wafer experiments
Silvia Armini
Steven Demuynck
Zaid El-mekki
Johan Swerts
Magi Margalit Nagar
Aleksandar Radisic
Nancy Heylen
Gerald Beyer
Leonardus Leunissen
Philippe M Vereecken
P1
Conference
2011
2010
Copper plating on resistive substrates, diffusion barrier and alternative seed layers
A Radisic
Magi Margalit Nagar
Katrien Strubbe
S Armini
Z El-Mekki
H Volders
W Ruythooren
PM Vereecken
P1
Conference
2010
Direct copper plating on a RuTa substrate
Magi Margalit Nagar
A Radisic
Katrien Strubbe
Philippe M Vereecken
C3
Conference
2010
Tailoring copper island density for copper plating on a RuTa substrate
Magi Margalit Nagar
Philippe Vereecken
Alexandar Radisic
Katrien Strubbe
P1
Conference
2010