Research Explorer

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Researcher

Maaike Op de Beeck

Publications & Research Data

Awards & Distinctions

85 Results

2025

Biocompatible and hermetic encapsulation of PMUTs : effects of parylene F-VT4 and ALD stacks on membrane vibration and acoustic performance

Esmaeil Afshari SavojbolaghSamer HouriRik VerplanckeVeronique RochusMaarten CauwePieter GijsenberghMaaike Op de Beeck

A1 Journal Article in SENSORS

Quality and lifetime of thin parylene F-VT4 coatings for hermetic encapsulation of implantable medical devices

Esmaeil Afshari SavojbolaghRik VerplanckeMaarten CauweMaaike Op de Beeck

A1 Journal Article in COATINGS

Sputtered iridium oxide electrodes optimization and implementation for impedimetric identification of S. aureus and P. aeruginosa biofilms

Francesco GrassiCharlotte CumsDieter CuypersRik VerplanckeThijs VackierDavid SchaubroeckMaxime Van HaeverbekeHans SteenackersMaaike Op de Beeck

A1 Journal Article in JOURNAL OF THE ELECTROCHEMICAL SOCIETY

2024

Biocompatible hermetic encapsulation of PMUTs for usage in implantable medical devices

Esmaeil Afshari SavojbolaghSamer HouriRik VerplanckeVeronique RochusMaarten CauwePieter GijsenberghXavier RottenbergMaaike Op de Beeck

2021

Investigating the nucleation of AlOx and HfOx ALD on polyimide : influence of plasma activation

Laura Astoreca AlvarezDavid SchaubroeckParinaz Saadat Esbah TabaeiRouba GhobeiraMaaike Op de BeeckRino MorentHerbert De SmetNathalie De Geyter

A1 Journal Article in COATINGS

2020

Accelerated hermeticity testing of biocompatible moisture barriers used for the encapsulation of implantable medical devices

Changzheng LiMaarten CauweLothar MaderDavid SchaubroeckMaaike Op de Beeck

A1 Journal Article in COATINGS

Development of an active high-density transverse intrafascicular micro-electrode probe

Rik VerplanckeMaarten CauweDavid SchaubroeckDieter CuypersBjorn VandecasteeleLothar MaderCeline VanhaverbekeMarco BalliniJohn O’CallaghanErkuden Goikoetxea et al.

A1 Journal Article in JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Long-term miniaturized flexible hermetic encapsulation for implantable medical devices using polymers and atomic layer deposited ceramics

Changzheng LiMaaike Op de BeeckJan Vanfleteren

Non-thermal plasma activation of BPDA-PPD polyimide for improved cell-material interaction

Laura Astoreca AlvarezPieter CoolsDavid SchaubroeckMahtab AsadianSheida AliakbarshiraziHeidi DeclercqMaaike Op de BeeckRino MorentHerbert De SmetNathalie De Geyter

A1 Journal Article in POLYMER

The use of ALD layers for hermetic encapsulation in the development of a flexible implantable micro electrode for neural recording and stimulation

David SchaubroeckChangzheng LiRik VerplanckeDieter CuypersMaarten CauweMaaike Op de Beeck

Visualizing the nucleation of ALD on polymers

Laura Astoreca AlvarezParinaz Saadat Esbah TabaeiDavid SchaubroeckMaaike Op de BeeckRino MorentHerbert De SmetNathalie De Geyter

2019

Cold plasma activation of BPDA-PPD polyimide for improved biocompatibility

Laura Astoreca AlvarezPieter CoolsMahtab AsadianDavid SchaubroeckHeidi DeclerqMaaike Op de BeeckRino MorentHerbert De SmetNathalie De Geyter

Comparison of copper electroplating, copper wet etching and linear sweep voltammetry as techniques to investigate the porosity of atomic layer deposited Al2O3

Celine VanhaverbekeMaarten CauweArno StockmanMaaike Op de BeeckHerbert De Smet

A1 Journal Article in THIN SOLID FILMS

FITEP : a Flexible Implantable Thin Electronic Package platform for long term implantation applications, based on polymer and ceramic ALD multilayers

Maaike Op de BeeckRik VerplanckeDavid SchaubroeckChangzheng LiDieter CuypersMaarten CauweBjorn VandecasteeleLothar MaderCeline VanhaverbekeJohn O’Callaghan et al.

Ultra-long-term reliable encapsulation using an atomic layer deposited Hfo2/Al2o3/Hfo2 triple-interlayer for biomedical implants

Changzheng LiMaarten CauweYang YangDavid SchaubroeckLothar MaderMaaike Op de Beeck

A1 Journal Article in COATINGS

2017

Accelerated hermeticity testing of biocompatible moisture barriers used for encapsulation of implantable medical devices

Changzheng LiLothar MaderCeline VanhaverbekeDavid SchaubroeckMaarten CauweMaaike Op de Beeck

Intraneural active probe for bidirectional peripheral nerve interface

Marco BalliniJoonsung BaeNicola MarroccoRik VerplanckeDavid SchaubroeckDieter CuypersMaarten CauweJohn O'CallaghanAhmed FahmyNima Maghari et al.

Polyimide-ald-polyimide layers as hermetic encapsulant for implants

David SchaubroeckRik VerplanckeMaarten CauweDieter CuypersKim BaumansMaaike Op de Beeck

Ultra-thin biocompatible implantable chip for bidirectional communication with peripheral nerves

Maaike Op de BeeckRik VerplanckeDavid SchaubroeckDieter CuypersMaarten CauweBjorn VandecasteeleJohn O'CallaghanDries BraekenAlexandru AndreiAndrea Firrincieli et al.

2016

Polymer-based encapsulation materials with optimized diffusion barrier properties for flexible hermetic medical electronics

Maaike Op de BeeckDavid SchaubroeckMaarten Cauwe

Superior moisture barrier properties of CMOS passivation stacks by the use of plasma-densified oxides

Maaike Op de BeeckChangzheng LiHarold Dekkers

2015

A Subcutaneous Biochip for Remote Monitoring of Human Metabolism : Packaging and Biocompatibility Assessment

Andrea CavalliniTanja Rezzonico JostSeyedeh Sara GhoreishizadehJacopo OlivoMaaike Op de BeeckBenjamin GorissenFabio GrassiGiovanni De MicheliSandro Carrara

A1 Journal Article in IEEE SENSORS JOURNAL

2014

Electrochemical fabrication of platinum interconnects for implantable electronic devices

A. RadisicB. M. MorcosMaaike Op de BeeckJ. M. O'CallaghanC. Van Hoof

A1 Journal Article in MICROELECTRONIC ENGINEERING

Soft, comfortable polymer dry electrodes for high quality ECG and EEG recording

Yun-Hsuan ChenMaaike Op de BeeckLuc VanderheydenEvelien CarretteVojkan MihajlovićKris VanstreelsBernard GrundlehnerStefanie GadeynePaul BoonChris Van Hoof

A1 Journal Article in SENSORS

Three-Dimensional Transient Thermal Analysis for a Silicon PCR Microreactor

Omar IbrahimBenjamin JonesMohammed HassabMaaike Op de Beeck

A1 Journal Article in NUMERICAL HEAT TRANSFER PART A-APPLICATIONS

2013

Comb-shaped Polymer-based Dry Electrodes for EEG/ECG Measurements with High User Comfort

Y. H. ChenMaaike Op de BeeckL. VanderheydenV. MihajlovicB. GrundlehnerC. Van Hoof

Electrodeposition of Platinum Thin Films as Interconnects Material for Implantable Medical Applications

B. M. MorcosJ. M. O'CallaghanM. F. AmiraC. Van HoofMaaike Op de Beeck

A1 Journal Article in JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Improved chip & component encapsulation by dedicated diffusion barriers to reduce corrosion sensitivity in biological and humid environments

Maaike Op de BeeckAhmed JarbouiMaarten CauweHeidi DeclercqGriet UytterhoevenMaria CornelissenJan VanfleterenChris Van Hoof

Miniaturized pumps and valves, based on conductive polimer actuators, for lab-on-chip application

M. HiraokaP. FioriniBjorn VandecasteeleH. TanakaTomas PodprockySteven Van PutMaaike Op de BeeckT. MatsunoI. Yamashita

Multi-sensors modules in SiGeMEMS technology

HAC TilmansA WitvrouwS SeveriP HelinMA ErismisL HaspeslaghMaaike Op de BeeckTom SterkenV RochusRF Yazicioglu et al.

One-time deformable electronics

Imen ChtiouiSheila DunphyKristof DhaenensMaaike Op de BeeckMohamed Hedi BedouiJan VanfleterenFrederick Bossuyt

Parylene C for hermetic and flexible encapsulation of interconnects and electronic components

Ahmed JarbouiMaarten CauweFilip VermeirenRik VerplanckeHamadi KhemakhemJan VanfleterenMaaike Op de Beeck

Photo-definable polyimide-based flat UTCP technology for 3D-stacking application

Swarnakamal PriyabadiniTom SterkenMaaike Op de BeeckJan Vanfleteren

2012

A MICRO-PCR CHAMBER SUITABLE FOR INTEGRATION INTO A MONOLITHIC SILICON LAB-ON-A-CHIP PLATFORM

B. JonesP. FioriniS. PeetersB. MajeedMaaike Op de BeeckI. YamashitaC. Van Hoof

Biocompatible encapsulation and interconnection technology for implantable electronic devices

Maaike Op de BeeckJohn O'CallaghanKaren QianBishoy M. MorcosAleksandar RadisicKarl MalachowskiM. F. AmiraChris Van Hoof

Biocompatible packaging solutions for implantable electronic systems for medical applications

Maaike Op de BeeckJohn O'CallaghanKaren QianKarl MalachowskiJan VanfleterenChris Van Hoof

Fully Integrated Biochip Platforms for Advanced Healthcare

Sandro CarraraSara GhoreishizadehJacopo OlivoIrene TaurinoCamilla Baj-RossiAndrea CavalliniMaaike Op de BeeckCatherine DehollainWayne BurlesonFrancis Gabriel Moussy et al.

A1 Journal Article in SENSORS

High-yield embedding of 30µm thin chips in a flexible PCB using a photopatternable polyimide based ultra-thin chip package (UTCP)

Tom SterkenMaaike Op de BeeckFilip VermeirenTom TorfsLiang WangSwarnakamal PriyabadiniKristof DhaenensDieter CuypersJan Vanfleteren

Miniature conductive polymer actuators for high pressure generation in lab on chip systems

M. HiraokaP. FioriniJ. O'CallaghanI. YamashitaC. Van HoofMaaike Op de Beeck

A1 Journal Article in SENSORS AND ACTUATORS A-PHYSICAL

Novel Miniaturized Packaging for Implantable Electronic Devices

Karen QianMaaike Op de BeeckGeorge BryceKarl MalachowskiChris Van Hoof

Reliability Study of Reference Semiconductor Encapsulation Materials for Biocompatible Packaging

Karl MalachowskiKaren QianMaaike Op de BeeckRita VerbeeckGeorge BryceHarold DekkersDeniz S. Tezcan

Silicon Based System for Single-Nucleotide-Polymorphism Detection: Chip Fabrication and Thermal Characterization of Polymerase Chain Reaction Microchamber

Bivragh MajeedBen JonesDeniz S. TezcanNina TutunjyanLuc HaspeslaghSara PeetersPaolo FioriniMaaike Op de BeeckChris Van HoofMaki Hiraoka et al.

A1 Journal Article in JAPANESE JOURNAL OF APPLIED PHYSICS

2011

2-Scale Topography Dry Electrode for Biopotential Measurements

F. VanlerbergheM. De VolderMaaike Op de BeeckJ. PendersD. ReynaertsR. PuersC. Van Hoof

Design and characterization of a biocompatible packaging concept for implantable electronic devices

Maaike Op de BeeckKaren QianPaolo FioriniKarl MalachowskiChris Van Hoof

Development of Cost-effective Biocompatible Packaging for Microelectronic Devices

Karen QianKarl MalachowskiPaolo FioriniDimitrios VelenisMaaike Op de BeeckChris Van Hoof

HIGH PRESSURE PUMP AS LAB ON CHIP COMPONENT FOR MICRO-FLUIDIC INTEGRATED SYSTEM

M. HiraokaP. FioriniI. YamashitaC. Van HoofMaaike Op de Beeck

Hydrogel Optimization Towards Fibroblast-friendly Biomimetic Coatings for Implantable Devices

A. Sanchez LindeJ. M. O'CallaghanMaaike Op de BeeckH. Pereira NevesC. Van HoofR. Mertens

Sub-micro-liter electrochemical single-nucleotide-polymorphism detector for lab-on-chip system

Hiroyuki TanakaPaolo FioriniSara PeetersBivragh MajeedTom SterkenMaaike Op de BeeckIchiro Yamashita

2010

An IC-centric biocompatible chip encapsulation fabrication process

Maaike Op de BeeckAntonio La MannaThibault BuissonEric DyDimitrios VelenisFabrice AxisaPhilippe SoussanChris Van Hoof

An invisible interface

Maaike Op de BeeckKarolien Jans

A1 Journal Article in CHEMISTRY & INDUSTRY

Biocompatibility assessment of advanced wafer-level based chip encapsulation

Eric DyRita VosJens RipAntonio la MannaMaaike Op de Beeck

Design and fabrication of a biomedical Lab-on-Chip system for SNP detection in DNA

Maaike Op de BeeckW. De MalscheM. HiraokaP. FioriniL. ZhangJ. Op De BeeckB. MajeedH. TanakaD. Sabuncuoglu TezcanG. Desmet et al.

Integrated fluidic

M. HiraokaP. FioriniL. ZhangW. De MalscheB. MajeedD. Sabuncuoglu TezcanG. DesmetI. YamashitaC. Van HoofMaaike Op de Beeck

Tuning Electrode Impedance for the Electrical Recording of Biopotentials

M. B. A. FontesMaaike Op de BeeckC. Van HoofH. P. Neves

2009

Auto-oscillation and narrow spectral lines in spin-torque oscillators based on MgO magnetic tunnel junctions

T. DevolderL. BianchiniJoo-Von KimP. CrozatC. ChappertS. CornelissenMaaike Op de BeeckL. Lagae

A1 Journal Article in JOURNAL OF APPLIED PHYSICS

Auto-oscillation threshold and line narrowing in MgO-based spin-torque oscillators

S. CornelissenL. BianchiniG. HrkacMaaike Op de BeeckL. LagaeJoo-Von KimT. DevolderP. CrozatC. ChappertT. Schrefl

A1 Journal Article in EPL

Effect of patterning on the saturation magnetization in MgO based nanopillars

S. CornelissenL. BianchiniA. HelmerT. DevolderJoo-Von KimMaaike Op de BeeckW. Van RoyL. LagaeC. Chappert

A1 Journal Article in JOURNAL OF APPLIED PHYSICS

2008

30nm half-pitch metal patterning using Motif (TM) CD shrink technique and double patterning - art. no. 69242C

Janko VersluijsJ-F. De MarneffeDanny GoossensMaaike Op de BeeckTom VandeweyerVincent WiauxHerbert StruyfMireille MaenhoudtMohand BrouriJohan Vertommen et al.

Integration of 50nm half pitch single damascene copper trenches in Black Diamond (R) II by means of double patterning 193nm immersion lithography on metal hardmask

J. Van OlmenA. Al-BayatiG. BeyerP. BoelenL. CarbonellKelvin ChanI. CiofiM. ClaesA. CockburnG. Druais et al.

2007

A novel plasma-assisted shrink process to enlarge process windows of narrow trenches and contacts for 45nm node applications and beyond - art. no. 65190U

Maaike Op de BeeckJanko VersluijsZsolt TokeiSteven DemuynckJ-F De MarneffeWerner BoullartSerge VanhaelemeerschHelen ZhuPeter CiriglianoElizabeth Pavel et al.

Combined illumination sources for hyper-NA contact hole printing

J. BekaertV. TruffertP. WillemsL. Van LookMaaike Op de BeeckE. HendrichG. Vandenberghe

A1 Journal Article in SOLID STATE TECHNOLOGY

Manufacturability issues with Double Patterning for 50nm half pitch single damascene applications, using RIELACS (R) shrink and corresponding OPC

Maaike Op de BeeckJanko VersluijsVincent WiauxTom VandeweyerIvan CiofiHerbert StruyfDirk HendrickxJan Van Olmen

Novel patterning shrink technique enabling sub-50nm trench and contact integration

S. DemuynckZs. TokeiC. ZhaoJ. F. de MarneffeH. StruyfW. BoullartMaaike Op de BeeckL. CarbonellN. HeylenJ. Vaes et al.

2006

Early learning on hyper-NA lithography using two-beam immersion interference

Eric HendrickxMaaike Op de BeeckRoel GronheidJanko VersluijsLieve Van LookMonique ErckenGeert Vandenberghe

High and hyper NA immersion lithography using advanced patterning film APF (TM)

Marc J. van der ReijdenMaaike Op de BeeckErik SleeckxPatrick JaenenEddy KunnenBart DegrooteWendy YehRobert Schreutelkamp

1999

CD control using SiON BARL processing for sub-0.25 mu m lithography

F ZhangMaaike Op de BeeckM SchaekersK RonseW ConleyP GopalanH GangalaM DusaJ Bendik

A1 Journal Article in MICROELECTRONIC ENGINEERING

1998

Bottom-ARC optimization methodology for 0.25 mu m lithography and beyond

Maaike Op de BeeckG VandenbergheP JaenenFH ZhangC DelvauxP RichardsonI van PuyenbroeckK RonseJE LambJBC van der Hilst et al.

Nanoscaled interdigitated electrode arrays for biochemical sensors

P Van GerwenW LaureynW LaureysG HuyberechtsMaaike Op de BeeckK BaertJ SulsW SansenP JacobsL Hermans et al.

A1 Journal Article in SENSORS AND ACTUATORS B-CHEMICAL

1997

Manufacturable DUV lithography processes for 0.25 mu m technology contact and via layers

D BakerMaaike Op de BeeckH BotermansL Vandenhove

A1 Journal Article in MICROELECTRONIC ENGINEERING

NA/sigma optimisation strategies for an advanced DUV stepper applied to 0.25 mu m and sub-0.25 mu m critical levels

Maaike Op de BeeckKurt RonseKouros GhandehariPatrick JaenenHarry BotermansJo FindersJohn LilygrenDaniel BakerGeert VandenberghePeter De Bisschop et al.

Nanoscaled interdigitated electrode arrays for biochemical sensors

P VanGerwenW LaureysG HuyberechtsMaaike Op de BeeckK BaertJ SulsA VarlanW SansenL HermansR Mertens

1996

Characterisation and optimisation of CD control for 0.25 mu m CMOS applications

K RonseMaaike Op de BeeckA YenKH KimL VandenHove

DUV resist profile improvement on TiN deposited metal layer

CH LinCC ChenJS JenqMaaike Op de BeeckL Vandenhove

Optical proximity effects and correction strategies for chemical amplified DUV resists

Maaike Op de BeeckB BruggemanH BotermansV VanDriesscheA YenA TritchkovR JonckheereK RonseL VandenHove

1995

DUV LITHOGRAPHY FOR 0.35-MU-M CMOS PROCESSING

V VANDRIESSCHEAM GOETHALSMaaike Op de BeeckK RONSEL VANDENHOVE

A1 Journal Article in MICROELECTRONIC ENGINEERING

1994

FUNDAMENTAL PRINCIPLES OF PHASE-SHIFTING MASKS BY FOURIER OPTICS - THEORY AND EXPERIMENTAL-VERIFICATION

K RONSEMaaike Op de BeeckL VANDENHOVE

A1 Journal Article in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

LITHOGRAPHIC STRATEGIES FOR 0.35-MU-M POLY-GATES FOR RANDOM LOGIC APPLICATIONS

Maaike Op de BeeckV VANDRIESSCHEL VANDENHOVEH DIJKSTRA

1993

TOPOGRAPHICAL MASKS - A NEW APPROACH TO INCREASE THE DOF ON TOPOGRAPHICAL SUBSTRATES

Maaike Op de BeeckA HISASUEA TOKUIH KUSUNOSEK KAMONH MORIMOTO

A1 Journal Article in MICROELECTRONIC ENGINEERING

1992

A NOVEL PROCESS FOR PHASE-SHIFTING MASK FABRICATION

H KUSUNOSES AOYAMAK HOSONOS TAKEUCHIS MATSUDAMaaike Op de BeeckN YOSHIOKAY WATAKABE

DRY DEVELOPMENT OF SURFACE IMAGING RESISTS - A MAJOR PARAMETER FOR PROCESS OPTIMIZATION

Maaike Op de BeeckM GOETHALSL VANDENHOVE

A1 Journal Article in JOURNAL OF THE ELECTROCHEMICAL SOCIETY

INFLUENCE OF SHIFTER ERRORS ON THE PRINTABILITY OF L/S STRUCTURES USING THE ALTERNATED PHASE-SHIFTING DESIGN - SIMULATIONS AND EXPERIMENTS

Maaike Op de BeeckK RONSEK KAMONM FUJINAGAH KUSUNOSEH MORIMOTO

A1 Journal Article in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

SILYLATION OF NOVOLAC BASED RESISTS - INFLUENCE OF DEEP-ULTRAVIOLET INDUCED CROSS-LINKING

Maaike Op de BeeckL VANDENHOVE

A1 Journal Article in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

1991

IMPROVEMENT OF FOCUS AND EXPOSURE LATITUDE BY THE USE OF PHASE-SHIFTING MASKS FOR DUV APPLICATIONS

Maaike Op de BeeckA TOKUIM FUJINAGAN YOSHIOKAK KAMONT HANAWAK TSUKAMOTO

1990

GAS-PHASE SILYLATION IN THE DIFFUSION ENHANCED SILYLATED RESIST PROCESS FOR APPLICATION TO SUB-0.5-MU-M OPTICAL LITHOGRAPHY

KH BAIKL VANDENHOVEAM GOETHALSMaaike Op de BeeckB ROLAND

A1 Journal Article in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Sub-half-micron deep-UV lithography using wet and dry developable resist schemes

Maaike Op de BeeckNandasiri SamarakoneKi-Ho BaikLuc Van den HoveDouglas R Ritchie