Research Explorer

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Researcher

Li'ao Cao

Awards & Distinctions

3 Results

2020

A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films

Li'ao CaoFelix MattelaerTimo SajavaaraJolien DendoovenChristophe Detavernier

A1 Journal Article in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

2019

Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films

Fatemeh SM HashemiLi'ao CaoFelix MattelaerTimo SajavaaraJ Ruud van OmmenChristophe Detavernier

A1 Journal Article in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic layer deposition of Al2O3 using aluminum triisopropoxide (ATIP) : a combined experimental and theoretical study

Ba Tai TruongLi'ao CaoFelix MattelaerGeert RampelbergFatemeh SM HashemiJolien DendoovenJ Ruud van OmmenChristophe DetavernierMarie-Françoise Reyniers

A1 Journal Article in JOURNAL OF PHYSICAL CHEMISTRY C