Inventor of
METHOD FOR DEPOSITING A RUTHENIUM-CONTAINING FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS
Patent application(s)
WO2019158960
( 21 August 2019 )
Self cleaning gas sensor comprising catalytic nanoparticles in a nanoporous thin film
Patent application(s)
WO2014111586
( 23 July 2014 )