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Researcher
Guy Buyle
Profile
Projects
Publications
Activities
Awards & Distinctions
13
Results
2006
Monte Carlo simulation of the transport of atoms in DC magnetron sputtering
Stijn Mahieu
Guy Buyle
Diederik Depla
Sarah Heirwegh
Pieter Ghekiere
Roger De Gryse
A1
Journal Article
in
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
2006
2005
Simplified model for the d.c. planar magnetron discharge
Guy Buyle
Roger De Gryse
Diederik Depla
Dissertation
2005
2004
Calculation of the effective gas interaction probabilities of the secondary electrons in a dc magnetron discharge
Guy Buyle
Diederik Depla
Karin Eufinger
Roger De Gryse
A1
Journal Article
in
JOURNAL OF PHYSICS D-APPLIED PHYSICS
2004
Characterization of the Electron Movement in Varying Magnetic Fields and the Resulting Anomalous Erosion
Guy Buyle
Diederik Depla
Karin Eufinger
Johan Haemers
Roger De Gryse
W DE BOSSCHER
C1
Conference
2004
Simplified model for the DC planar magnetron discharge
Guy Buyle
Diederik Depla
Karin Eufinger
Johan Haemers
W DE BOSSCHER
Roger De Gryse
A1
Journal Article
in
VACUUM
2004
2003
Dissection of the Planar Magnetron Discharge
Guy Buyle
Diederik Depla
Karin Eufinger
Johan Haemers
Roger De Gryse
W DE BOSSCHER
C1
Conference
2003
Recapture of secondary electrons by the target in a DC planar magnetron discharge
Guy Buyle
W DE BOSSCHER
D DOPLA
Karin Eufinger
Johan Haemers
Roger De Gryse
A1
Journal Article
in
VACUUM
2003
Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge
Guy Buyle
Diederik Depla
Karin Eufinger
Johan Haemers
Roger De Gryse
W DE BOSSCHER
A1
Journal Article
in
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
2003
Simplified model for the DC planar magnetron discharge
Guy Buyle
Diederik Depla
Johan Haemers
Roger De Gryse
A4
Journal Article
in
BELVAC NEWS
2003
2002
Importance of recapture of secondary electrons in cylindrical and planar magnetron discharges.
Guy Buyle
Diederik Depla
Karin Eufinger
Johan Haemers
Roger De Gryse
W DE BOSSCHER
A1
Journal Article
in
CZECHOSLOVAK JOURNAL OF PHYSICS
2002
Influence of recapture of secondary electrons on the magnetron sputtering deposition process.
Guy Buyle
Diederik Depla
Karin Eufinger
Johan Haemers
Roger De Gryse
C1
Conference
2002
Low pressure Behaviour of the sputter magnetron discharge
Guy Buyle
Diederik Depla
W DE BOSSCHER
Karin Eufinger
Johan Haemers
Roger De Gryse
C1
Conference
2002
Uniformity Control in Sputter Deposition Processes.
W DE BOSSCHER
Anja Blondeel
Guy Buyle
C1
Conference
2002