Research Explorer

Your browser does not support JavaScript or JavaScript is not enabled. Without JavaScript some functions of this webapplication may be disabled or cause error messages. To enable JavaScript, please consult the manual of your browser or contact your system administrator.

Researcher

Elisabeth Levrau

Awards & Distinctions

13 Results

2020

Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy

Sofie VandenbrouckeElisabeth LevrauMatthias MinjauwMichiel Van DaeleEduardo Solano MinuesaRita VosJolien DendoovenChristophe Detavernier

Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy

Sofie VandenbrouckeElisabeth LevrauMatthias MinjauwMichiel Van DaeleEduardo Solano MinuesaRita VosJolien DendoovenChristophe Detavernier

A1 Journal Article in PHYSICAL CHEMISTRY CHEMICAL PHYSICS

2019

Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium

Sofie VandenbrouckeElisabeth LevrauMatthias MinjauwKevin Van de KerckhoveKilian Devloo-CasierSreeprasanth Pulinthanathu SreeJohan A MartensRita VosKarolien JansJolien Dendooven et al.

2015

Modification of ultra low-k dielectric films by O₂ and CO₂ plasmas

Teju Tunde OlawumiElisabeth LevrauMikhail KrishtabChristophe DetavernierJohann W BarthaKaidong XuFrederic LazzarinoMikhail R Baklanov

A1 Journal Article in ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY

Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films

Yiting SunElisabeth LevrauLiping ZhangJef GeypenJohan MeersschautAlexis FranquetQuoc Le LeJean-François de MarneffeHugo BenderHerbert Struyf et al.

A1 Journal Article in MICROELECTRONIC ENGINEERING

2014

In situ IR spectroscopic investigation of alumina ALD on porous silica films: thermal versus plasma-enhanced ALD

Elisabeth LevrauKevin Van de KerckhoveKilian Devloo-CasierSreeprasanth Pulinthanathu SreeJohan A MartensChristophe DetavernierJolien Dendooven

A1 Journal Article in JOURNAL OF PHYSICAL CHEMISTRY C

2013

Atomic layer deposition of TiO₂ on surface modified nanoporous low-k films

Elisabeth LevrauKilian Devloo-CasierJolien DendoovenKarl F LudwigPatrick VerdonckJohan MeersschautMikhail R BaklanovChristophe Detavernier

A1 Journal Article in LANGMUIR

Pore narrowing of mesoporous silica materials

Frederik GoethalsElisabeth LevrauEls De CanckMikhail R BaklanovChristophe DetavernierIsabel Van DriesschePascal Van Der Voort

A1 Journal Article in MATERIALS

Sealed ultra low-k organosilica films with improved electrical, mechanical and chemical properties

Frederik GoethalsElisabeth LevrauGlenn PollefeytMikhail R BaklanovIvan CiofiKris VanstreelsChristophe DetavernierIsabel Van DriesschePascal Van Der Voort

A1 Journal Article in JOURNAL OF MATERIALS CHEMISTRY C

2012

In situ monitoring of atomic layer deposition in nanoporous thin films using ellipsometric porosimetry

Jolien DendoovenKilian Devloo-CasierElisabeth LevrauRobbert Van HoveSreeprasanth Pulinthanathu SreeMikhail R BaklanovJohan A MartensChristophe Detavernier

A1 Journal Article in LANGMUIR

Selective and reversible ammonia gas detection with nanoporous film functionalized silicon photonic micro-ring resonator

Nebiyu Adello YeboSreeprasanth Pulinthanathu SreeElisabeth LevrauChristophe DetavernierZeger HensJohan A MartensRoel Baets

A1 Journal Article in OPTICS EXPRESS

Tuning the pore size of ink-bottle mesopores by atomic layer deposition

Jolien DendoovenBart GorisKilian Devloo-CasierElisabeth LevrauEllen BiermansMikhail R BaklanovKarl F LudwigPascal Van Der VoortSara BalsChristophe Detavernier

A1 Journal Article in CHEMISTRY OF MATERIALS

2011

In situ x-ray characterization and electron tomography study of ALD coatings in mesoporous thin films

Jolien DendoovenEllen BiermansElisabeth LevrauKilian Devloo-CasierKarl LudwigPascal Van Der VoortSara BalsChristophe Detavernier