Research Explorer

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Researcher

Delphine Longrie

Awards & Distinctions

14 Results

2016

Plasma-enhanced ALD on particles and powders

Geert RampelbergDelphine LongrieDavy DeduytscheJohan HaemersChristophe Detavernier

Thermal and plasma enhanced atomic layer deposition on powders and particles

Geert RampelbergVéronique CremersDelphine LongrieDavy DeduytscheJohan HaemersChristophe Detavernier

2014

Conformal nanocoatings for surface engineering of particles by thermal and plasma-enhanced atomic layer deposition using a rotary reactor

Geert RampelbergDelphine LongrieDavy DeduytscheJohan HaemersKris DriesenChristophe Detavernier

Plasma enhanced atomic layer deposition on powders

Geert RampelbergDelphine LongrieDavy DeduytscheChristophe Detavernier

Reactor concepts for atomic layer deposition on agitated particles: a review

Delphine LongrieDavy DeduytscheChristophe Detavernier

A1 Journal Article in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Thermal and plasma-enhanced atomic layer deposition of TiN using TDMAT and NH3 on particles agitated in a rotary reactor

Delphine LongrieDavy DeduytscheJohan HaemersPhilippe SmetKris DriesenChristophe Detavernier

A1 Journal Article in ACS APPLIED MATERIALS & INTERFACES

2013

A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Delphine LongrieDavy DeduytscheJohan HaemersKris DriesenChristophe Detavernier

Atomic layer deposition for surface engineering of powders

Delphine LongrieChristophe Detavernier

Thermal and plasma-enhanced ALD of TiN on powders using a rotary reactor

Delphine LongrieDavy DeduytscheJohan HaemersKris DriesenChristophe Detavernier

2012

A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Delphine LongrieDavy DeduytscheJohan HaemersKris DriesenChristophe Detavernier

A1 Journal Article in SURFACE & COATINGS TECHNOLOGY

A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Delphine LongrieKilian Devloo-CasierJohan HaemersKris DriesenChristophe Detavernier

Comparison of three processes for plasma-enhanced ALD of platinum

Delphine LongrieKilian Devloo-CasierSven Van den BergheKris DriesenChristophe Detavernier

Plasma-enhanced ALD of platinum with O₂, N₂ and NH₃ plasmas

Delphine LongrieKilian Devloo-CasierDavy DeduytscheSven Van den BergheKris DriesenChristophe Detavernier

A1 Journal Article in ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY

2010

Texture of atomic layer deposited ruthenium

Jan MusschootQi XieDavy DeduytscheKoen De KeyserDelphine LongrieJohan HaemersSven Van den BergheRoland Van MeirhaegheJan D'HaenChristophe Detavernier

A1 Journal Article in MICROELECTRONIC ENGINEERING