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Researcher
Ba Tai Truong
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Patents
1
Result
2019
Atomic layer deposition of Al2O3 using aluminum triisopropoxide (ATIP) : a combined experimental and theoretical study
Ba Tai Truong
Li'ao Cao
Felix Mattelaer
Geert Rampelberg
Fatemeh SM Hashemi
Jolien Dendooven
J Ruud van Ommen
Christophe Detavernier
Marie-Françoise Reyniers
A1
Journal Article
in
JOURNAL OF PHYSICAL CHEMISTRY C
2019