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Researcher

Anneke Segers

Profile

Projects

Publications

Activities

Awards & Distinctions

2 Results

2002

Arc Discharges in the Reactive Sputtering of Electrical Insulating Compounds.

Anneke SegersDiederik DeplaKarin EufingerJohan HaemersRoger De Gryse

C1 Conference

2002

Target voltage behaviour during DC sputtering of silicon in an argon/nitrogen mixture.

Diederik DeplaA COLPAERTKarin EufingerAnneke SegersJohan HaemersRoger De Gryse

A1 Journal Article in VACUUM

2002