Research Explorer

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Researcher

An Vercaemst

Publications & Research Data

Awards & Distinctions

3 Results

1995

Electrical transport in (100)CoSi2/Si contacts

Albert LauwersKK Kyllesbech LarsenM Van HoveRonald VerbeeckK MaexM Van RossumAn VercaemstRoland VanmeirhaegheFelix Cardon

A1 Journal Article in JOURNAL OF APPLIED PHYSICS

Hydrogen passivation caused by 'soft' sputter etch cleaning of Si

An VercaemstRoland VanmeirhaegheWilly LaflereFelix Cardon

A1 Journal Article in SOLID-STATE ELECTRONICS

1993

On the influence of sputter etch cleaning on the silicidation, the thermal stability and the electrical characteristics of Ti/rho-Si contacts

An VercaemstRoland VanmeirhaegheWilly LaflereFelix CardonWilmert De BosscherR.J. Schreutelkamp

A1 Journal Article in SOLID-STATE ELECTRONICS